Novel heaters for thermal processing - (including rapid thermal processing of silicon)

被引：0

作者：

Sekhar, JA ^{[1
]}

Penumella, S ^{[1
]}

Fu, M ^{[1
]}

机构：

[1] MHI Inc, Cincinnati, OH 45212 USA

来源：

TRANSIENT THERMAL PROCESSING TECHNIQUES IN ELECTRONIC MATERIALS | 1996年

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In the past few years, novel Molybdenum diSilicide composite heaters have become available in various sizes and shapes. These vastly expand the flexibility of the processing technologies which may now be attempted. The heaters allow heat up time of the order of one second and heat fluxes greater than 10(6) W/m(2). In addition, these heaters may be used in air up to 1900 degrees C or may be used in other atmospheres. An instant convection blower assembly is also available for hot gas up to 1100 degrees C. Several unique designs are discussed in this article.

引用

页码：171 / 175

页数：5

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