Atmospheric aging and thermal annealing effects in a-C:H thin films

被引：10
|
作者：
Manage, DP
Perz, JM
Gaspari, F
Sagnes, E
Zukotynski, S
机构：
[1] Univ Toronto, Dept Elect & Comp Engn, Toronto, ON M5S 3G4, Canada
[2] Univ Toronto, Dept Phys, Toronto, ON M5S 1A7, Canada
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 2000年 / 270卷 / 1-3期
基金：
加拿大自然科学与工程研究理事会;
关键词：
D O I：
10.1016/S0022-3093(00)00059-4
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Atmospheric aging and thermal annealing effects have been studied in hydrogenated amorphous carbon (a-C:H) thin films deposited using a de saddle field glow discharge technique with different ion energies (85-225 eV) during deposition. The a-C:fl films grown with low ion energies showed aging effects when they were exposed to the ambient atmosphere. Infrared (IR) absorption due to O-H and C=O vibration modes increased while the IR absorption due to C-H vibrations decreased with aging. The absence of absorption due to O-D vibrations in deuterated films indicates that the films reacted with water rather than oxygen when exposed to the atmosphere. The C-H and O-H bond concentrations decreased when the a-C:H films which had been exposed to the atmosphere for a one month period were thermally annealed. The a-C:H films grown with high ion energies exhibited neither atmospheric aging nor thermal annealing effects. (C) 2000 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：247 / 254
页数：8
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