Optical and structural properties of thin film amorphous oxides for photonic structures

被引：0
|
作者：
Juskevicius, Kestutis [1 ]
Randel, Emmett [1 ]
Le Yang [1 ]
Fazio, Mariana [1 ]
Davenport, Aaron [1 ]
Menoni, Carmen S. [1 ]
机构：
[1] Colorado State Univ, Ft Collins, CO 80523 USA
来源：
2020 IEEE PHOTONICS CONFERENCE (IPC) | 2020年
基金：
美国国家科学基金会;
关键词：
metal oxides; optical properties; interference coatings; laser coatings;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Metal oxides, Ta2O5, HfO2 and SiO2 nanoceramics are used in photonic structures as they are transparent at wavelength between 0.3-5 mu m. Extremely high optical quality thin films by ion beam sputtering are demonstrated for applications in multilayer interference coating structures.
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页数：2
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