Low-Temperature Growth of ZnO Films by Spray Pyrolysis

被引：20

作者：

Yoshino, Kenji ^{[1
]}

Takemoto, Yujin ^{[1
]}

Oshima, Minoru ^{[1
]}

Toyota, Kouji ^{[2
]}

Inaba, Koichiro ^{[2
]}

Haga, Ken-ichi ^{[2
]}

Tokudome, Koichi ^{[2
]}

机构：

[1] Miyazaki Univ, Dept Elect & Elect Engn, Miyazaki 8892192, Japan

[2] Tosoh Finechem Corp, Div Res & Dev, Yamaguchi 7460006, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2011年 / 50卷 / 04期

关键词：

THIN-FILMS; DEPOSITION; VAPOR;

D O I：

10.1143/JJAP.50.040207

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nondoped ZnO film on a polyethylene terephthalate film was successfully grown by conventional spray pyrolysis at 100 degrees C using a diethylzinc-based solution under air atmosphere. The samples had an average optical transmittance of more than 80%, a flat surface, and an a-axis orientation from the optical transmittance, scanning electron microscopy, and X-ray diffraction measurements, respectively. It was assumed that the growth at low temperature was attributed to atmospheric oxygen and/or steam. (C) 2011 The Japan Society of Applied Physics

引用

页数：3

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