Soft defect localization (SDL) in integrated circuits using laser scanning microscopy

被引：0
|
作者：
Bruce, MR [1 ]
Bruce, VJ [1 ]
Eppes, DH [1 ]
Wilcox, J [1 ]
Cole, EI [1 ]
Tangyunyong, P [1 ]
Hawkins, CF [1 ]
Ring, R [1 ]
机构：
[1] Adv Micro Devices Inc, Austin, TX USA
来源：
2003 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2 | 2003年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：662 / 663
页数：2
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