Soft defect localization (SDL) in integrated circuits using laser scanning microscopy

被引：0

作者：

Bruce, MR ^{[1
]}

Bruce, VJ ^{[1
]}

Eppes, DH ^{[1
]}

Wilcox, J ^{[1
]}

Cole, EI ^{[1
]}

Tangyunyong, P ^{[1
]}

Hawkins, CF ^{[1
]}

Ring, R ^{[1
]}

机构：

[1] Adv Micro Devices Inc, Austin, TX USA

来源：

2003 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：662 / 663

页数：2

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