Investigation of interlayer phenomena in Ti/Pt electrodes for ferroelectric thin film devices

被引：0
|
作者：
Frey, J
Schönecker, A
Schlenkrich, F
Thomas, J
Hermel, W
机构：
[1] Fraunhofer Inst Keram Technol & Sinterwerkstoffe, D-01277 Dresden, Germany
[2] Inst Festkorper & Werkstoffforsch, Dresden, Germany
来源：
ZEITSCHRIFT FUR METALLKUNDE | 2001年 / 92卷 / 02期
关键词：
PTZ thin films; Pt electrodes; diffusion of Ti in PTZ;
D O I：
暂无
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
The paper deals with the interrelations between preparation and microstructure of a Si/SiO2/Ti/Pt/TiO2/Pb(Zr,Ti)O-3 multilayer configuration. A wet chemical approach was used for Pb(Zr,Ti)O-3 (PZT) deposition on sputtered Ti/Pt thin films. The chosen sol-gel process allows heterogeneous nucleation of PZT on the underlying Pt electrode at a temperature of 400 degreesC without interference of Ti diffusion from the Ti interlayer. In this case the texture of the PZT film can be switched from (100) to (111) by the thin TiO2 interlayer on top of the Pt (111). This knowledge is essential for the fabrication of ferroelectric thin film devices with tailored properties.
引用
收藏
页码：141 / 144
页数：4
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