A Carbon Nanotube Gas Sensor Fabricated by Dielectrophoresis and Its Application for NH3 Detection

被引：2

作者：

Wang, Renhui ^{[1
]}

Li, Hongtao ^{[1
]}

Pan, Min ^{[1
]}

Chen, Dajing ^{[1
]}

机构：

[1] Zhejiang Univ, Dept Biomed Engn, Biosensor Natl Special Lab, Hangzhou 310027, Peoples R China

来源：

2009 ANNUAL INTERNATIONAL CONFERENCE OF THE IEEE ENGINEERING IN MEDICINE AND BIOLOGY SOCIETY, VOLS 1-20 | 2009年

关键词：

AMMONIA;

D O I：

10.1109/IEMBS.2009.5334531

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

Multi-walled carbon nanotubes (MWNTs) were successfully manipulated by dielectrophoresis (DEP) to form electrical connection between interdigitated gold electrodes (IDEs) and were demonstrated to serve as gas sensor for NH3 detection. The MWNTs were suspended in ethanol and deposited on the IDEs under the effect of DEP. After the evaporation of ethanol, the MWNTs remained between the gaps of the IDEs. The electrical conductivity of the DEP-fabricated MWNTs sensor decreased when exposed to NH3 at room temperature. There is a good linear correlation between the decreasing amplitude of conductance and the NH3 concentration, and the detection limit of 10ppm NH3 could be achieved.

引用

页码：6046 / 6049

页数：4

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