共 50 条
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- [3] Bulk micromachining for sensors and actuators MEMS RELIABILITY FOR CRITICAL APPLICATIONS, 2000, 4180 : 6 - 15
- [4] Bulk micromachining for sensors and actuators MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VI, 2000, 4174 : 6 - 15
- [5] Bulk micromachining for sensors and actuators MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING III, 2000, 4175 : 6 - 15
- [6] Bulk micromachining for sensors and actuators MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS, 2000, 4179 : 6 - 15
- [8] Lithium niobate bulk micromachining for medical sensors FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS, 2006, : 495 - +
- [9] Advanced bulk micromachining of silicon for thermal insulation of sensors SAA '96 - NATIONAL MEETING ON SENSORS FOR ADVANCED APPLICATIONS, 1997, 54 : 11 - 18