Bulk micromachining for sensors and actuators

被引:0
|
作者
Esashi, M [1 ]
机构
[1] Tohoku Univ, New Ind Creat Hatchery Ctr, Sendai, Miyagi 9808579, Japan
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D O I
10.1117/12.395630
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:6 / 15
页数:10
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