Influence of Zr/Ti ratio on electrical properties of PZT thick films deposited by aerosol deposition process

被引：3

作者：

Hahn, B. D. ^{[1
]}

Park, D. S. ^{[1
]}

Choi, J. J. ^{[1
]}

Ryu, J. H. ^{[1
]}

Yoon, W. H. ^{[1
]}

Kim, D. Y. ^{[2
]}

机构：

[1] Korea Inst Mach & Mat, Dept Future Technol, 66 Sangnam Dong, Chang Won 641010, Gyeong Nam, South Korea

[2] Seoul Natl Univ, Sch Mat Sci & Engn, Seoul 151742, South Korea

来源：

2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2 | 2007年

关键词：

D O I：

10.1109/ISAF.2007.4393297

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Lead zirconate titanate (PZT) thick films with thickness of 10 mu m were deposited on silicon and sapphire substrates by aerosol deposition process at room temperature. The films with Zr/Ti ratio of 45155, 52/48 and 60/40 were fabricated in order to investigate the effect of compositional modifications on the electrical properties of PZT thick films. Microscopic examination of the films revealed dense microstructures with no crack. After deposition, the films were annealed at 600, 700 and 900 C for 1h in an electric furnace. The annealed films showed markedly improved electrical properties in comparison with the as-deposited films. Relative dielectric constant was the highest for the PZT (52/48) film. As the Zr/Ti ratio was increased, the remanent polarization and the coercive field were decreased. PZT (52/48) film annealed at 900 C for I h exhibited the best overall combination of electrical properties.

引用

页码：457 / +

页数：2

共 50 条

[31] Influence of carrier gas conditions on electrical and optical properties of Pb(Zr,Ti)O3 thin films prepared by aerosol deposition method
Akedo, J
Lebedev, M
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (9B): : 5528 - 5532
[32] Electrical properties of PZT thin films by photochemical deposition
Park, HH
Yoon, S
Park, HH
Hill, RH
THIN SOLID FILMS, 2004, 447 : 669 - 673
[33] Piezoelectric properties of sputtered PZT films: influence of structure, micro structure, film thickness (Zr,Ti) ratio and Nb substitution
Remiens, D
Cattan, E
Soyer, C
Haccart, T
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2002, 5 (2-3) : 123 - 127
[34] Ba2Ti9O20 Thick Films Deposited by Novel Aerosol Deposition Method
Wang, Sea-Fue
Wang, Yuh-Ruey
Ho, Song-Han
JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (04)
[35] Dependence of electrical properties of epitaxial Pb(Zr,Ti)O3 thick films on crystal orientation and Zr/(Zr+Ti) ratio -: art. no. 094106
Yokoyama, S
Honda, Y
Morioka, H
Okamoto, S
Funakubo, H
Iijima, T
Matsuda, H
Saito, K
Yamamoto, T
Okino, H
Sakata, O
Kimura, S
JOURNAL OF APPLIED PHYSICS, 2005, 98 (09)
[36] Electrical properties of PZT thin films deposited on LSCO electrodes
Kim, ID
Choi, WY
Choi, GP
Park, JH
Lee, CH
Kim, HG
Noh, TH
Bai, K
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 1999, 35 : S496 - S500
[37] Effect of electrode and substrate on the fatigue behavior of PZT thick films fabricated by aerosol deposition
Han, Guifang
Ryu, Jungho
Yoon, Woon-Ha
Choi, Jong-Jin
Hahn, Byung-Dong
Kim, Jong-Woo
Park, Dong-Soo
CERAMICS INTERNATIONAL, 2012, 38 : S241 - S244
[38] Effect of Zr/Ti ratio on the properties of PZT thin films made by MOCVD using ultrasonic nebulization
Lee, CH
Kim, SI
INTEGRATED FERROELECTRICS, 2003, 52 : 147 - 154
[39] Formation of silver films for advanced electrical properties by using aerosol deposition process
Cho, Myung-Yeon
Lee, Dong-Won
Kim, Ik-Soo
Lee, Won-Ho
Yoo, Je-Wook
Ko, Pil-Ju
Koo, Sang-Mo
Choi, Youn-Kyu
Oh, Jong-Min
JAPANESE JOURNAL OF APPLIED PHYSICS, 2018, 57 (11)
[40] Effects of substrate materials on piezoelectric properties of BaTiO3 thick films deposited by aerosol deposition
Kawakami, Yoshihiro
Watanabe, Masato
Arai, Ken-Ichi
Sugimoto, Satoshi
JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (10)

← 1 2 3 4 5 →