Vacuum gauges with emitters based on carbon nanotubes

被引：12
|
作者：
Kim, SJ [1 ]
机构：
[1] Kyungnam Univ, Div Elect & Elect Engn, Masan 631701, South Korea
来源：
TECHNICAL PHYSICS LETTERS | 2005年 / 31卷 / 07期
关键词：
Carbon Nanotubes; Field Emission; Vacuum Chamber; Electric Discharge; Pressure Sensor;
D O I：
10.1134/1.2001065
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
New vacuum gauges with emitters based on carbon nanotubes (CNTs) are described. The relation between the field emission from CNTs and the residual pressure in the vacuum chamber is considered. The operation of the proposed pressure sensor obeys the electric discharge theory based on the Paschen law, whereby the pressure is determined by measuring the discharge current as a function of the concentration of a gas (air) ionized as a result of the collisions with electrons emitted from CNTs. (C) 2005 Pleiades Publishing, Inc.
引用
收藏
页码：597 / 599
页数：3
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