Low power, wide dynamic range carbon nanotube vacuum gauges

被引：0

作者：

Kaul, A. B. ^{[1
]}

Manohara, H. M. ^{[1
]}

机构：

[1] CALTECH, Jet Propuls Lab, Pasadena, CA 91125 USA

来源：

MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2008年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present carbon nanotube vacuum gauges that operate at low power (nW-mu W) and exhibit a wide-dynamic range (760 Torr - 10(-6) Torr). Pressure sensitivity was found to increase rapidly as the bias power was increased. In addition, by etching part of the thermal SiO2 beneath the tubes and minimizing heat conduction through the substrate, pressure sensitivity was extended toward lower pressures. Results are compared to a conventional thin film meander resistor, which was fabricated and whose pressure response was also measured for comparative purposes.

引用

页码：156 / 159

页数：4

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