INOR 530-Tungsten imido and hydrazido complexes as precursors for CVD of WNx and WNxCy thin films

被引：0
|
作者：
McElwee-White, Lisa [1 ]
Reitfort, Laurel L. [1 ]
Koller, Juergen [1 ]
Ajmera, Hiral M. [2 ]
Anderson, Timothy J. [2 ]
机构：
[1] Univ Florida, Dept Chem, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2007年 / 234卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
530-INOR
引用
收藏
页数：1
相关论文
共 36 条
  • [1] INOR 408-Tungsten imido complexes as precursors for the CVD of tungsten nitride thin films
    McElwee-White, Lisa
    Reitfort, Laurel L.
    Ajmera, Hiral M.
    Won, Yong Sun
    Anderson, Timothy J.
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2006, 232
  • [2] INOR 740-Chemical vapor deposition of WNxCy thin films using tungsten hydrazido complexes
    Koller, Juergen
    Ajmera, Hiral M.
    Anderson, Timothy J.
    McElwee-White, Lisa
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2007, 234
  • [3] Tungsten imido complexes as precursors to tungsten carbonitride thin films
    Potts, Stephen E.
    Carmalt, Claire J.
    Blackman, Christopher S.
    Leese, Thomas
    Davies, Hywel O.
    DALTON TRANSACTIONS, 2008, (42) : 5730 - 5736
  • [4] Tungsten nitrido precursors for deposition of WNxCy thin films
    Nolan, Michelle
    Koley, Arijit
    Kim, Seo Young
    Anderson, Timothy
    McElwee-White, Lisa
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2016, 252
  • [5] Tungsten nitrido precursors for deposition of WNxCy thin films
    Nolan, Michelle
    Touchton, Alexander
    Kim, Seo Young
    Anderson, Timothy
    McElwee-White, Lisa
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2018, 255
  • [6] Tungsten imido complexes as precursors for mocvd of tungsten nitride thin films.
    McElwee-White, L
    Ortiz, CG
    Zhang, Y
    Johnston, SW
    Bchir, OJ
    Anderson, TJ
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2001, 222 : U577 - U577
  • [7] Tungsten imido complexes as precursors for MoCvd of tungsten nitride thin films.
    McElwee-White, L
    Brooks, BC
    Ortiz, CG
    Johnston, SW
    Bchir, OJ
    Anderson, TJ
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2002, 224 : U682 - U682
  • [8] In situ Raman investigation of chemical vapor deposition of WNxCy thin films from tungsten imido precursors
    Nolan, Michelle
    Koley, Arijit
    Kim, Seo Young
    Anderson, Timothy
    McElwee-White, Lisa
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2017, 253
  • [9] Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WNxCy Thin Films
    Nolan, Michelle M.
    Touchton, Alexander J.
    Richey, Nathaniel E.
    Ghiviriga, Ion
    Rocca, James R.
    Abboud, Khalil A.
    McElwee-White, Lisa
    EUROPEAN JOURNAL OF INORGANIC CHEMISTRY, 2018, (01) : 46 - 53
  • [10] INOR 750-Precursors for the CVD of antimony sulphide thin films
    Rodriguez-Castro, Jorge
    Molloy, Kieran C.
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2006, 232
1234