INOR 530-Tungsten imido and hydrazido complexes as precursors for CVD of WNx and WNxCy thin films

被引：0
|
作者：
McElwee-White, Lisa [1 ]
Reitfort, Laurel L. [1 ]
Koller, Juergen [1 ]
Ajmera, Hiral M. [2 ]
Anderson, Timothy J. [2 ]
机构：
[1] Univ Florida, Dept Chem, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2007年 / 234卷
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
530-INOR
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页数：1
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