Tungsten nitrido precursors for deposition of WNxCy thin films

被引：0
|
作者：
Nolan, Michelle [1 ]
Touchton, Alexander [1 ]
Kim, Seo Young [2 ]
Anderson, Timothy [2 ]
McElwee-White, Lisa [1 ]
机构：
[1] Univ Florida, Dept Chem, Gainesville, FL 32611 USA
[2] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2018年 / 255卷
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D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
26
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页数：1
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