Development of a Combined Optical and X-ray Interferometer (COXI) system for nanometrology

被引：0
|
作者：
Yim, NB [1 ]
Kim, MS [1 ]
Eom, CI [1 ]
机构：
[1] Korea Res Inst Stand & Sci, Length Grp, Taejon 305600, South Korea
来源：
LASER INTERFEROMETRY IX: APPLICATIONS | 1998年 / 3479卷
关键词：
COXI; optical interferometer; x-ray interferometer; precision translation stage; transducer calibration; phase sensitive detector; heterodyne differential interferometer; nanometrology;
D O I：
10.1117/12.316438
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
In the COXI(Combined Optical and X-ray Interferometer) system, optical and x-ray interferometers are combined to provide a means for the calibration of transducers with the traceablity to the standards of length in the sub-nanometer region. The COXI mainly comprises a laser interferometer, an x-ray interferometer, and a precision translation stage. The laser interferometer used for the COXI instrument was a Michelson type, differential heterodyne interferometer having common optical path. A monolithic x-ray interferometer was made from a silicon single crystal. We have designed a control procedure to operate the COXI instrument for the calibration of nano-transducers and developed a phase demodulator for use with the laser interferometer. The bandwidth, phase resolution, and the measurement uncertainty of the interferometer were found I kHz, 0.01 degrees, and 0.1 degrees, respectively.
引用
收藏
页码：94 / 101
页数：8
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