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Chinese Acad Sci, Inst Microelect, High Frequency High Voltage Devices & Integrated C, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China Chinese Acad Sci, Inst Microelect, High Frequency High Voltage Devices & Integrated C, Key Lab Microelect Devices & Integrated Technol, Beijing 100029, Peoples R China