Design and Validation of a Simulation-based Modular Planning and Scheduling System of Semiconductor Fabrication Facilities

被引：1
|
作者：
Li Li [1 ]
Qiao Fei [1 ]
机构：
[1] Tongji Univ, Sch Elect & Informat Engn, Shanghai 201804, Peoples R China
来源：
MEASURING TECHNOLOGY AND MECHATRONICS AUTOMATION, PTS 1 AND 2 | 2011年 / 48-49卷
关键词：
scheduling; planning; simulation; semiconductor manufacturing;
D O I：
10.4028/www.scientific.net/AMM.48-49.378
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A simulation-based modular planning and scheduling system developed for semiconductor fabrication facilities (SFFs) is discussed. Firstly, the general structure model (GSM) for SFFs, composed of a configurable definition layer, a physical layer, a process information layer and a planning and scheduling layer, is proposed. Secondly, a data-based dynamic simulation modeling method is given. Thirdly, a simulation-based modular planning and scheduling system (SMPSS) for SFFs, including model modules, release control modules, scheduling modules and rescheduling modules, is designed and developed. Finally, a case study is used to demonstrate the effectiveness of SMPSS.
引用
收藏
页码：378 / 381
页数：4
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