Multigate Ferroelectric Transistor Design Toward 3-nm Technology Node

An advanced gate-stack design of ferroelectric (FE) transistors has been proposed and investigated for logic compatible program/erase voltage, better scalability, and suppressed depolarization field. The ferroelectric-metal (FeM) FinFET (FeM-FinFET) and stacked nanosheets transistor (FeM-Nanosheet), which have an FE layer on top of the transistor's gate, could adjust the area ratio (AR) between the FE capacitor (A(FE)) and the MOS capacitor (A(MOS)) (AR = A(FE)/A(MOS)) using the floating gate between them, thereby enhancing the electric field on the FE layer. In particular, the proposed FeM-Nanosheet could have the flexibility to lower the operating voltage and depolarization field by increasing the number of nanosheets to reduce the AR.