Simulation of Line-Edge Roughness Effects in Silicon Nanowire MOSFETs

In this paper, the effects of nanowire (NW) lineedge roughness (LER) in gate-all-around (GAA) silicon nanowire MOSFETs (SNWTs) are investigated by 3-D statistical simulation in terms of both performance variation and mean value degradation. A physical model is developed for NW LER induced performance degradation in SNWTs for the first time. The results indicate large performance mean value degradations due to NW LER in SNWTs. However, the LER induced parameter variation is still acceptable. In addition, as the LER correlation length (Lambda) scales beyond the gate length, new distribution of performance parameters is observed, which has dual-peaks rather than single in conventional Gaussian distribution. The optimization for NW LER parameters is given for SNWT design as well.