Fluoropolymer outgassing in focused ion beam micromachining

被引：3
|
作者：
Matsui, Y [1 ]
Seki, S [1 ]
Tagawa, S [1 ]
机构：
[1] Osaka Univ, Inst Sci & Ind Res, Osaka, Japan
来源：
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY | 2005年 / 18卷 / 04期
关键词：
FIB; fluoropolymer; micromachining; outgassing;
D O I：
10.2494/photopolymer.18.501
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
[No abstract available]
引用
收藏
页码：501 / 502
页数：2
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