Innovative design and modelling of a micromechanical relay with electrostatic actuation

被引：15
|
作者：
Sattler, R
Voigt, P
Pradel, H
Wachutka, G
机构：
[1] Tech Univ Munich, Inst Phys Electrotechnol, D-80290 Munich, Germany
[2] Fraunhofer Inst Microelect Circuits & Syst, D-80686 Munich, Germany
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2001年 / 11卷 / 04期
关键词：
D O I：
10.1088/0960-1317/11/4/325
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The behaviour of a surface-micromachined electrostatic microrelay and the influence of the design parameters on the pull-in voltage and the contact force are analysed by means of finite-element method simulations. Three models have been used and compared-a fully three-dimensional coupled electromechanical numerical simulation using CoSolveEM, a two-dimensional coupled simulation, and a simplified semi-analytical model based on the parallel-plate capacitor approximation-and these have shown good conformity. As a new idea, an extension paddle attached to the contact bar is proposed and the positive influence on the pull-in voltage and the contact force is demonstrated.
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页码：428 / 433
页数：6
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