MOCVD of hard metallurgical coatings: Examples in the Cr-C-N system

被引:8
|
作者
Maury, F [1 ]
机构
[1] ENSIACET, CNRS, CIRIMAT, F-31077 Toulouse, France
关键词
MOCVD; metalorganic precursors; chromium nitrides; chromium carbides; hard coatings;
D O I
10.1016/j.electacta.2004.10.088
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
All individual phases of the ternary Cr-C-N system including stable and metastable ones can be deposited at low temperature by metalorganic chemical vapor deposition (MOCVD). These growth processes are mainly based on the use of bis(benzene)chromium as chromium source and various co-reactives. Then, from a good control of the reactive gas phase, it is possible to combine these MOCVD processes to grow in the same reactor protective coatings designed with a complex architecture based on polyphased, nanostructured or multilayer structure which exhibit enhanced properties. These deposition processes are described and the main features of the coatings are discussed. (C) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:4525 / 4530
页数:6
相关论文
共 50 条
  • [31] Nanostructured Ti-Cr-B-N and Ti-Cr-Si-C-N coatings for hard-alloy cutting tools
    F. V. Kiryukhantsev-Korneev
    A. N. Sheveiko
    V. A. Komarov
    M. S. Blanter
    E. A. Skryleva
    N. A. Shirmanov
    E. A. Levashov
    D. V. Shtansky
    Russian Journal of Non-Ferrous Metals, 2011, 52 : 311 - 318
  • [32] Hard Cr-Al-Si-B-(N) Coatings with Oxidation Resistance up to 1200°C
    Kiryukhantsev-Korneev, Ph. V.
    Pierson, J. F.
    Bauer, J. Ph.
    Levashov, E. A.
    Shtansky, D. V.
    GLASS PHYSICS AND CHEMISTRY, 2011, 37 (04) : 411 - 417
  • [33] Hard Cr-Al-Si-B-(N) coatings with oxidation resistance up to 1200°C
    Ph. V. Kiryukhantsev-Korneev
    J. F. Pierson
    J. Ph. Bauer
    E. A. Levashov
    D. V. Shtansky
    Glass Physics and Chemistry, 2011, 37 : 411 - 417
  • [34] Synthesis and characterisation of sputtered hard coatings of Cr-N/MoSx
    Budna, K. P.
    Watter, C.
    Spicak, R.
    Mitterer, C.
    SURFACE ENGINEERING, 2008, 24 (05) : 350 - 354
  • [35] Nanolayer (Ti,Cr)N coatings for hard particle erosion resistance
    Wolfe, Douglas E.
    Gabriel, Brian M.
    Reedy, Michael W.
    SURFACE & COATINGS TECHNOLOGY, 2011, 205 (19): : 4569 - 4576
  • [36] Effect of Molybdenum on Metallurgical and Wear Properties of Fe–Cr–C Hard facing alloy
    Mohammadreza Khanzadeh Gharah Abbas Saadat
    Kamran Shiran
    Hamid Amini
    Behrad Bakhtiari
    Protection of Metals and Physical Chemistry of Surfaces, 2019, 55 : 942 - 950
  • [37] Approaches to Increasing the Adhesion Strength of Hard Wear-Resistant Nanostructured Coatings Based on the Ti–B–(Cr, Si, C)–N System
    Ph. V. Kiryukhantsev-Korneev
    A. N. Sheveiko
    M. I. Petrzhik
    Protection of Metals and Physical Chemistry of Surfaces, 2019, 55 : 502 - 510
  • [38] Monolithic and multilayer Cr/CrN, Cr/Cr2N, and Cr2N/CrN coatings on hard and soft substrates
    Kuruppu, M.L.
    Negrea, G.
    Ivanov, I.P.
    Rohde, S.L.
    Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1998, 16 (3 pt 2):
  • [39] Monolithic and multilayer Cr/CrN, Cr/Cr2N, and Cr2N/CrN coatings on hard and soft substrates
    Kuruppu, ML
    Negrea, G
    Ivanov, IP
    Rohde, SL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03): : 1949 - 1955
  • [40] Monolithic and multilayer Cr/CrN, Cr/Cr2N, and Cr 2N/CrN coatings on hard and soft substrates
    Department of Mechanical Engineering, University of Nebraska, Lincoln, NE 68588-0656, United States
    J. Vac. Sci. Technol. A Vac. Surf. Films, 3 (1949-1955):