MOCVD of hard metallurgical coatings: Examples in the Cr-C-N system

被引:8
|
作者
Maury, F [1 ]
机构
[1] ENSIACET, CNRS, CIRIMAT, F-31077 Toulouse, France
关键词
MOCVD; metalorganic precursors; chromium nitrides; chromium carbides; hard coatings;
D O I
10.1016/j.electacta.2004.10.088
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
All individual phases of the ternary Cr-C-N system including stable and metastable ones can be deposited at low temperature by metalorganic chemical vapor deposition (MOCVD). These growth processes are mainly based on the use of bis(benzene)chromium as chromium source and various co-reactives. Then, from a good control of the reactive gas phase, it is possible to combine these MOCVD processes to grow in the same reactor protective coatings designed with a complex architecture based on polyphased, nanostructured or multilayer structure which exhibit enhanced properties. These deposition processes are described and the main features of the coatings are discussed. (C) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:4525 / 4530
页数:6
相关论文
共 50 条
  • [11] Selection of metalorganic precursors for MOCVD of metallurgical coatings: Application to Cr-based coatings
    Maury, F
    Gueroudji, L
    Vahlas, C
    SURFACE & COATINGS TECHNOLOGY, 1996, 86 (1-3): : 316 - 324
  • [12] Selection of metalorganic precursors for MOCVD of metallurgical coatings: application to Cr-based coatings
    CNRS/INPT-URA, Toulouse, France
    Surf Coat Technol, 1 -3 pt 1 (316-324):
  • [13] CHARACTERIZATION AND WEAR-RESISTANCE OF COATINGS IN THE CR-C-N TERNARY-SYSTEM DEPOSITED BY PHYSICAL VAPOR-DEPOSITION
    CHOLVY, G
    DEREP, JL
    GANTOIS, M
    THIN SOLID FILMS, 1985, 126 (1-2) : 51 - 60
  • [14] Nanostructure transition in Cr-C-N coatings deposited by pulsed closed field unbalanced magnetron sputtering
    Wu, Z. L.
    Lin, J.
    Moore, J. J.
    Lei, M. K.
    THIN SOLID FILMS, 2012, 520 (13) : 4264 - 4269
  • [15] Cr-C-N coatings deposited with different reactive carbon carrier gases in the arc PVD process
    Aachen Univ of Technology, Aachen, Germany
    Surf Coat Technol, 1-3 (416-421):
  • [16] Cr-C-N coatings deposited with different reactive carbon carrier gases in the arc PVD process
    Lugscheider, E
    Knotek, O
    Barimani, C
    Guerreiro, S
    Zimmermann, HK
    SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3): : 416 - 421
  • [17] OBTAINING AND CLASSIFICATION OF DEPOSITS REALIZED IN THE CR-C-N TERNARY-SYSTEM USING PVD
    CHOLVY, G
    DEREP, JL
    MICHEL, H
    GANTOIS, M
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1986, 41 (230): : 71 - 75
  • [18] Microstructure, mechanical and tribological properties of Cr-C-N coatings deposited by pulsed closed field unbalanced magnetron sputtering
    Wu, Z. L.
    Lin, J.
    Moore, J. J.
    Lei, M. K.
    SURFACE & COATINGS TECHNOLOGY, 2009, 204 (6-7): : 931 - 935
  • [19] Structure and properties of hard nanostructured coatings in Cr-B-N system
    Kiryukhantsev-Korneev, Ph. V.
    Pierson, J. F.
    Bauer, J. P.
    Levashov, E. A.
    Shtansky, D. V.
    NAMES 2007: 3RD FRANCE-RUSSIA SEMINAR, PROCEEDINGS, 2008, : 11 - +
  • [20] Microstructural characterization of Ti1-XAlXn and Cr(C,N) hard coatings
    Samardzija, Z
    Ceh, M
    PROCEEDINGS OF THE 5TH MULTINATIONAL CONGRESS ON ELECTRON MICROSCOPY, 2001, : 489 - 490