Morphological change of semiconductor growth interface from solution in a magnetic field

被引:4
|
作者
Inatomi, Y
Takada, A
Kuribayashi, K
机构
[1] Inst Space & Astronaut Sci, Sagamihara, Kanagawa 229, Japan
[2] Univ Tokyo, Dept Engn, Bunkyo Ku, Tokyo 113, Japan
关键词
NIR microscopy; in situ observation of semiconductor growth interface; GaP(1 1 1)B substrate; rotating and static magnetic fields; solution growth; thermal and solutal convections;
D O I
10.1016/S0022-0248(98)01184-1
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
In the present study, the morphological changes of a semiconductor growth interface from a solution were observed by near-infrared microscopy in rotating and static magnetic fields generated by two kinds of electromagnetic setups. The rotating magnetic setup had a maximum magnetic induction of 12 mT with a frequency of 50 Hz at the center of the furnace, The static magnetic field was produced by a single solenoid with a maximum magnetic induction of 800 mT. The growth of GaP/GaP (1 1 1) B was performed by a linear cooling method at the rate of 1 K/min under a starting growth temperature of 1173 K. The results revealed few differences in the morphological changes during growth under constant rotating magnetic fields of 0 and 12 mT. It was shown that the transverse static magnetic field of 800 mT reduced the growth rate and suppressed the appearance of macrosteps on the facet region. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:176 / 181
页数:6
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