Nanostructured oxides on porous silicon microhotplates for NH3 sensing

被引：16
|
作者：
Triantafyllopoulou, R. [2 ]
Illa, X. [1 ]
Casals, O. [1 ]
Chatzandroulis, S. [2 ]
Tsamis, C. [2 ]
Romano-Rodriguez, A. [1 ]
Morante, J. R. [1 ]
机构：
[1] Univ Barcelona, 7 EME CeRMAE IN 2, Dept Elect, E-08028 Barcelona, Spain
[2] NCSR Demokritos, Inst Microelect, Athens 15310, Greece
来源：
MICROELECTRONIC ENGINEERING | 2008年 / 85卷 / 5-6期
关键词：
gas sensors; porous silicon; micro-hotplates; nanostructured metal oxides; NH3; sensing;
D O I：
10.1016/j.mee.2007.12.038
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Low power micromachined gas sensors based on suspended micro-hotplates are presented in this work. The sensors were fabricated using Porous Silicon Technology. Two different metal-modified nanostructured sensitive materials were deposited on top of the active area of the micro-hotplates, using the micro-dropping technique: SnO2:Pd and WO3:Cr. For the characterization of both gas sensors, measurements in NH3 ambient took place, in isothermal mode of operation. Improved sensors characteristics were obtained for SnO2:Pd sensors, compared to WO3:Cr, for these operating conditions. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码：1116 / 1119
页数：4
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