Nanostructured oxides on porous silicon microhotplates for NH3 sensing

被引：16

作者：

Triantafyllopoulou, R. ^{[2
]}

Illa, X. ^{[1
]}

Casals, O. ^{[1
]}

Chatzandroulis, S. ^{[2
]}

Tsamis, C. ^{[2
]}

Romano-Rodriguez, A. ^{[1
]}

Morante, J. R. ^{[1
]}

机构：

[1] Univ Barcelona, 7 EME CeRMAE IN 2, Dept Elect, E-08028 Barcelona, Spain

[2] NCSR Demokritos, Inst Microelect, Athens 15310, Greece

来源：

MICROELECTRONIC ENGINEERING | 2008年 / 85卷 / 5-6期

关键词：

gas sensors; porous silicon; micro-hotplates; nanostructured metal oxides; NH3; sensing;

D O I：

10.1016/j.mee.2007.12.038

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Low power micromachined gas sensors based on suspended micro-hotplates are presented in this work. The sensors were fabricated using Porous Silicon Technology. Two different metal-modified nanostructured sensitive materials were deposited on top of the active area of the micro-hotplates, using the micro-dropping technique: SnO2:Pd and WO3:Cr. For the characterization of both gas sensors, measurements in NH3 ambient took place, in isothermal mode of operation. Improved sensors characteristics were obtained for SnO2:Pd sensors, compared to WO3:Cr, for these operating conditions. (C) 2008 Elsevier B.V. All rights reserved.

引用

页码：1116 / 1119

页数：4

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