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- [1] PHOTOLITHOGRAPHY STUDY FOR HIGH-DENSITY INTEGRATION TECHNOLOGIES2016 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC), 2016,Suda, Hiromi论文数: 0 引用数: 0 h-index: 0机构: Canon Inc, 20-2 Kiyohara Kogya Danchi, Utsunomiya, Tochigi 3213292, Japan Canon Inc, 20-2 Kiyohara Kogya Danchi, Utsunomiya, Tochigi 3213292, JapanMizutani, Masaki论文数: 0 引用数: 0 h-index: 0机构: Canon Inc, 20-2 Kiyohara Kogya Danchi, Utsunomiya, Tochigi 3213292, Japan Canon Inc, 20-2 Kiyohara Kogya Danchi, Utsunomiya, Tochigi 3213292, JapanHirai, Shin-Ichiro论文数: 0 引用数: 0 h-index: 0机构: Canon Inc, 20-2 Kiyohara Kogya Danchi, Utsunomiya, Tochigi 3213292, Japan Canon Inc, 20-2 Kiyohara Kogya Danchi, Utsunomiya, Tochigi 3213292, JapanMori, Ken-Ichiro论文数: 0 引用数: 0 h-index: 0机构: Canon Inc, 20-2 Kiyohara Kogya Danchi, Utsunomiya, Tochigi 3213292, Japan Canon Inc, 20-2 Kiyohara Kogya Danchi, Utsunomiya, Tochigi 3213292, JapanMiura, Seiya论文数: 0 引用数: 0 h-index: 0机构: Canon Inc, 20-2 Kiyohara Kogya Danchi, Utsunomiya, Tochigi 3213292, Japan Canon Inc, 20-2 Kiyohara Kogya Danchi, Utsunomiya, Tochigi 3213292, Japan
- [2] Process technologies for the integration of high density phase change RAM2005 International Conference on Integrated Circuit Design and Technology, 2005, : 19 - 22Jeong, GT论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaHwang, YN论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaLee, SH论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaLee, SY论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaRyoo, KC论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaPark, JH论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaSong, YJ论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaAhn, SJ论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaJeong, CW论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaKim, YT论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaHorii, H论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaHa, YH论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaKoh, GH论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaJeong, HS论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South KoreaKim, K论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Adv Technol Dev Team, Yongin 449711, Gyeonggi Do, South Korea
- [3] High density and low power design of MRAMIEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST, 2004, : 575 - 578Hung, CC论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanKao, AJ论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanChen, YS论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanWang, YH论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanHsu, HH论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanChen, CA论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanLee, YJ论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanChen, WC论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanLee, JY论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanChen, WS论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanLin, WC论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanShen, KH论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanWei, JH论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanWang, LC论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanChen, KL论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanChao, S论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanTang, DD论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, TaiwanTsai, M论文数: 0 引用数: 0 h-index: 0机构: ERSO, ITRI, Hsinchu, Taiwan ERSO, ITRI, Hsinchu, Taiwan
- [4] Technological issues for high-density MRAMIEEE NMDC 2006: IEEE NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE 2006, PROCEEDINGS, 2006, : 182 - 182Kim, Taewan论文数: 0 引用数: 0 h-index: 0机构: Samsung Adv Inst Technol, Semicond Devices & Mat Lab, Suwon 440600, South Korea Samsung Adv Inst Technol, Semicond Devices & Mat Lab, Suwon 440600, South Korea论文数: 引用数: h-index:机构:Cho, Young-jin论文数: 0 引用数: 0 h-index: 0机构: Samsung Adv Inst Technol, Semicond Devices & Mat Lab, Suwon 440600, South Korea Samsung Adv Inst Technol, Semicond Devices & Mat Lab, Suwon 440600, South KoreaKim, Kwang-suk论文数: 0 引用数: 0 h-index: 0机构: Samsung Adv Inst Technol, Semicond Devices & Mat Lab, Suwon 440600, South Korea Samsung Adv Inst Technol, Semicond Devices & Mat Lab, Suwon 440600, South KoreaKim, Keewon论文数: 0 引用数: 0 h-index: 0机构: Samsung Adv Inst Technol, Semicond Devices & Mat Lab, Suwon 440600, South Korea Samsung Adv Inst Technol, Semicond Devices & Mat Lab, Suwon 440600, South Korea
- [5] High Density Integration Technologies for SiPh Based Optical I/Os2023 IEEE 73RD ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE, ECTC, 2023, : 212 - 215Muth, Karl论文数: 0 引用数: 0 h-index: 0机构: Opt Syst Div Broadcom, San Jose, CA USA Opt Syst Div Broadcom, San Jose, CA USARaghuraman, Vivek论文数: 0 引用数: 0 h-index: 0机构: Opt Syst Div Broadcom, San Jose, CA USA Opt Syst Div Broadcom, San Jose, CA USAKannan, Sukeshwar论文数: 0 引用数: 0 h-index: 0机构: Opt Syst Div Broadcom, San Jose, CA USA Opt Syst Div Broadcom, San Jose, CA USAPotluri, Hari论文数: 0 引用数: 0 h-index: 0机构: Opt Syst Div Broadcom, San Jose, CA USA Opt Syst Div Broadcom, San Jose, CA USA
- [6] Technological issues for high-density MRAM developmentJOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2004, 282 : 232 - 236Kim, T论文数: 0 引用数: 0 h-index: 0机构: Samsung Adv Inst Technol, Mat & Dev Lab, Suwon 440600, South KoreaKim, YK论文数: 0 引用数: 0 h-index: 0机构: Samsung Adv Inst Technol, Mat & Dev Lab, Suwon 440600, South KoreaPark, W论文数: 0 引用数: 0 h-index: 0机构: Samsung Adv Inst Technol, Mat & Dev Lab, Suwon 440600, South Korea
- [7] High Density ST-MRAM Technology (Invited)2012 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2012,Slaughter, J. M.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USARizzo, N. D.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USAJanesky, J.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USAWhig, R.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USAMancoff, F. B.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USAHoussameddine, D.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USASun, J. J.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USAAggarwal, S.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USANagel, K.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USADeshpande, S.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USAAlam, S. M.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USAAndre, T.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USALoPresti, P.论文数: 0 引用数: 0 h-index: 0机构: Everspin Technol Inc, Chandler, AZ 85224 USA Everspin Technol Inc, Chandler, AZ 85224 USA
- [8] Future Prospects of MRAM Technologies2013 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2013,Yuasa, S.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanFukushima, A.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanYakushiji, K.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanNozaki, T.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanKonoto, M.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanMaehara, H.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanKubota, H.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanTaniguchi, T.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanArai, H.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanImamura, H.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanAndo, K.论文数: 0 引用数: 0 h-index: 0机构: Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan论文数: 引用数: h-index:机构:Bonell, F.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanSuzuki, Y.论文数: 0 引用数: 0 h-index: 0机构: Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan Japan Sci & Technol Agcy, CREST, Kawaguchi, Saitama 3320012, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanShimomura, N.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Corp R & D Ctr, Kawasaki, Kanagawa 2128582, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanKitagawa, E.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Corp R & D Ctr, Kawasaki, Kanagawa 2128582, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanIto, J.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Corp R & D Ctr, Kawasaki, Kanagawa 2128582, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanFujita, S.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Corp R & D Ctr, Kawasaki, Kanagawa 2128582, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanAbe, K.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Corp R & D Ctr, Kawasaki, Kanagawa 2128582, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanNomura, K.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Corp R & D Ctr, Kawasaki, Kanagawa 2128582, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanNoguchi, H.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Corp R & D Ctr, Kawasaki, Kanagawa 2128582, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, JapanYoda, H.论文数: 0 引用数: 0 h-index: 0机构: Toshiba Co Ltd, Ctr Semicond Res & Dev, Kawasaki, Kanagawa 2128520, Japan Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan
- [9] Integration technologies for high power density power electronic converters for AC drives2006 INTERNATIONAL SYMPOSIUM ON POWER ELECTRONICS, ELECTRICAL DRIVES, AUTOMATION AND MOTION, VOLS 1-3, 2006, : 634 - +Popovic, J.论文数: 0 引用数: 0 h-index: 0机构: European Ctr Power Elect, Landgrabenstr 94, D-90443 Nurnberg, Germany European Ctr Power Elect, Landgrabenstr 94, D-90443 Nurnberg, GermanyFerreira, J. A.论文数: 0 引用数: 0 h-index: 0机构: Delft Univ Technol, Delft 2628, Netherlands European Ctr Power Elect, Landgrabenstr 94, D-90443 Nurnberg, GermanyGerber, M. B.论文数: 0 引用数: 0 h-index: 0机构: Delft Univ Technol, Delft 2628, Netherlands European Ctr Power Elect, Landgrabenstr 94, D-90443 Nurnberg, GermanyKonig, A.论文数: 0 引用数: 0 h-index: 0机构: Rhein Westfal TH Aachen, ISEA, D-52066 Aachen, Germany European Ctr Power Elect, Landgrabenstr 94, D-90443 Nurnberg, Germanyde Doncker, R.论文数: 0 引用数: 0 h-index: 0机构: Rhein Westfal TH Aachen, ISEA, D-52066 Aachen, Germany European Ctr Power Elect, Landgrabenstr 94, D-90443 Nurnberg, Germany
- [10] Etch Process Technology for High Density STT-MRAM2018 IEEE INTERNATIONAL MAGNETIC CONFERENCE (INTERMAG), 2018,Endoh, T.论文数: 0 引用数: 0 h-index: 0机构: Tohoku Univ, Ctr Innovat Integrated Elect Syst CIES, Sendai, Miyagi, Japan Tohoku Univ, Grad Sch Engn, Sendai, Miyagi, Japan Tohoku Univ, Ctr Innovat Integrated Elect Syst CIES, Sendai, Miyagi, JapanKang, S.论文数: 0 引用数: 0 h-index: 0机构: Tokyo Electron Ltd, Yamanashi, Japan Tohoku Univ, Ctr Innovat Integrated Elect Syst CIES, Sendai, Miyagi, JapanKudo, T.论文数: 0 引用数: 0 h-index: 0机构: Tokyo Electron Ltd, Yamanashi, Japan Tohoku Univ, Ctr Innovat Integrated Elect Syst CIES, Sendai, Miyagi, JapanYagi, Y.论文数: 0 引用数: 0 h-index: 0机构: Tokyo Electron Ltd, Yamanashi, Japan Tohoku Univ, Ctr Innovat Integrated Elect Syst CIES, Sendai, Miyagi, Japan