Torsion Fatigue Testing of Polycrystalline Silicon Cross-Microbridge Structures

被引：2
|
作者：
Hung, Jeng-Nan [1 ]
Hocheng, Hong [1 ]
Sato, Kazuo [2 ]
机构：
[1] Natl Tsing Hua Univ, Dept Power Mech Engn, Hsinchu 30013, Taiwan
[2] Nagoya Univ, Dept Micronano Syst Engn, Nagoya, Aichi 4648603, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2011年 / 50卷 / 06期
关键词：
HIGH-CYCLE FATIGUE; FRACTURE STRENGTH; MICROCANTILEVER BEAM; POLYSILICON; MICROSTRUCTURES; STRESS; FILMS;
D O I：
10.1143/JJAP.50.06GM07
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In the rapid advancement of micro/nano-electro-mechanical systems (MEMS/NEMS) technology, however, the reliable applications lie in the characterization of the mechanical fatigue properties of the micro/nano-structures. This paper presents the fatigue life of polycrystalline silicon (poly-Si) cross-microbridge in torsion. The torsion testing specimens are fabricated by surface and bulk micromachining. In addition, the stresses of cross-microbridge structures are investigated at various dimensions. The numerical tool ANSYS is applied to calculate the stress distribution of the testing structure. The experimental fatigue life lies between 7.78 x 10(4)-1.48 x 10(7) cycles in use of the MTS Tytron 250 microforce testing system. The collective plot of poly-Si fatigue including the results of torsion will provide the MEMS device designer and researcher a good reference in the future applications. (c) 2011 The Japan Society of Applied Physics
引用
收藏
页数：5
相关论文
共 50 条
  • [1] Torsion fatigue testing of polycrystalline silicon cross-microbridge structures
    Hung, Jeng-Nan
    Hocheng, Hong
    Sato, Kazuo
    Japanese Journal of Applied Physics, 2011, 50 (6 PART 2)
  • [2] Various fatigue testing of polycrystalline silicon microcantilever beam in bending
    Hong Hocheng
    Hung, Jeng-Nan
    Guu, Yunn-Horng
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (06) : 5256 - 5261
  • [3] Microbridge testing of silicon nitride thin films deposited on silicon wafers
    Zhang, TY
    Su, YJ
    Qian, CF
    Zhao, MH
    Chen, LQ
    ACTA MATERIALIA, 2000, 48 (11) : 2843 - 2857
  • [4] Microbridge testing of silicon oxide/silicon nitride bilayer films deposited on silicon wafers
    Su, YJ
    Qian, CF
    Zhao, MH
    Zhang, TY
    ACTA MATERIALIA, 2000, 48 (20) : 4901 - 4915
  • [5] PLANT FOR FATIGUE TESTING OF TORSION SPRINGS
    ABRAMOV, AD
    INDUSTRIAL LABORATORY, 1959, 25 (03): : 366 - 368
  • [6] CROSS COMPARISON OF FATIGUE LIFETIME TESTING ON SILICON THIN FILM SPECIMENS
    Kamiya, S.
    Tsuchiya, T.
    Ikehara, T.
    Sato, K.
    Ando, T.
    Namazu, T.
    Takashima, K.
    2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 404 - 407
  • [7] CROSS comparison of fatigue lifetime testing on silicon thin film specimens
    Nagoya Institute of Technology, Nagoya, Japan
    不详
    不详
    不详
    不详
    不详
    不详
    Proc. IEEE Int. Conf. Micro Electro Mech. Syst. MEMS, 2011, (404-407):
  • [8] Fracture toughness and fatigue investigations of polycrystalline silicon
    Bagdahn, J
    Schischka, J
    Petzold, M
    Sharpe, WN
    RELIABILITY, TESTING AND CHARACTERIZATION OF MEMS/MOEMS, 2001, 4558 : 161 - 168
  • [9] SERIES OF EQUIPMENT FOR FATIGUE TORSION TESTING OF SPECIMENS
    GORDIENKO, AV
    KUTSEVOLOV, SM
    TSYGANOK, RY
    MALICH, NG
    SEMENENKO, AV
    ALEKSANDROV, AA
    STRENGTH OF MATERIALS, 1985, 17 (05) : 723 - 725
  • [10] STATISTICAL ASPECTS OF PROGRAMMED TORSION FATIGUE TESTING
    KOGAEV, VP
    GOLUBEV, AA
    INDUSTRIAL LABORATORY, 1970, 36 (05): : 757 - &
12345