Thermal insolation sensor with thick/thin film thermopile

被引:2
|
作者
Dziedzic, A [1 ]
Mlynarczyk, K [1 ]
Prociow, E [1 ]
机构
[1] Wroclaw Univ Technol, Fac Microsyst Elect & Photon, PL-50370 Wroclaw, Poland
关键词
D O I
10.1109/ISSE.2003.1260483
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Specially calibrated silicon solar cells or thermopile pyranometers are used for measurement of solar irradiance under natural sunlight. This paper presents steady state and dynamic properties of thermal insolation sensors where one arm of thermocouples is made from Pd4g-based thick film conductor and the second ones is prepared by magnetron sputtering of semiconductive Ge-based alloys. Such combination increased sensor sensitivity 30 times in comparison with thick film Pd4gAg thermocouple in the case of alumina substrate. For LTCC substrate the sensitivity is even 55 times larger. The insolation sensor made on LTCC has approximately 7 divided by 10 times larger thermal electric power E-T but at the same time two times larger thermal time constant than such a sensor on alumina. Therefore the effect of simple passive PD correction element on dynamic and steady-state properties of analysed insolation sensor is also presented.
引用
收藏
页码:57 / 62
页数:6
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