Impact of Heavy Ion Energy on Charge Yield in Silicon Dioxide

被引:2
|
作者
Emeliyanov, Vladimir V. [1 ]
Vatuev, Alexander S. [1 ]
Useinov, Rustem G. [1 ]
机构
[1] Res Inst Sci Instruments, Dept Radiat Testing, Lytkarino 140080, Russia
关键词
Charge carrier density; charge yield; heavy ion beams; silicon dioxide; single-event effect (SEE); MOS DEVICES; RADIAL-DISTRIBUTION; X-RAY; IRRADIATIONS; TRANSISTORS; DEPOSITION; TRACKS; CO-60; WATER; SIO2;
D O I
10.1109/TNS.2018.2813669
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The impact of heavy ion energy on charge yield in silicon dioxide was investigated by irradiating power VDMOSFETs with heavy ions at energies from 3 to 25 MeV/amu. The ion charge yield was determined by analyzing the gate voltage shifts of power VDMOSFETs induced by irradiation with Co-60 gamma-rays and several different heavy ion species. A strong dependence of the charge yield on the ion energy is revealed. The charge yield at ion energy of 25 MeV/amu is greater by nearly an order of magnitude than that at the ion energy of 3 MeV/amu. The results are consistent with simulations of heavy ion track structures for low-and high-energy ions.
引用
收藏
页码:1496 / 1502
页数:7
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