Characterizing the Two- and Three-Dimensional Resolution of an Improved Aberration-Corrected STEM

被引：28
|
作者：
Lupini, A. R. [1 ]
Borisevich, A. Y. [1 ]
Idrobo, J. C. [1 ]
Christen, H. M. [1 ]
Biegalski, M. [1 ]
Pennycook, S. J. [1 ]
机构：
[1] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA
来源：
MICROSCOPY AND MICROANALYSIS | 2009年 / 15卷 / 05期
关键词：
STEM; aberration; spherical; resolution; 3D; ELECTRON-MICROSCOPE; ATOMS; PROGRESS;
D O I：
10.1017/S1431927609990389
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The Successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, Custom built at a small number of sites to common instruments in many modern laboratories. Here we describe sonic initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype unproved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 angstrom can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.
引用
收藏
页码：441 / 453
页数：13
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