On-machine truing of diamond wheel and high-efficiency grinding of monocrystal silicon for aspheric surface

被引：9
|
作者：
Chen, Bing [1 ]
Guo, Bing [1 ]
Zhao, Qingliang [1 ]
机构：
[1] Harbin Inst Technol, Sch Mechatron Engn, Ctr Precis Engn, POB 413, Harbin 150001, Peoples R China
来源：
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE | 2017年 / 231卷 / 01期
基金：
中国国家自然科学基金;
关键词：
On-machine truing; high-efficiency grinding; truing performance; material removal rates; surface quality; ROUGHNESS; PROFILE;
D O I：
10.1177/0954405415616792
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
To realize the high-efficiency grinding of the aspheric surfaces on monocrystal silicon, a novel on-machine truing method for the resin-bonded arc-shaped diamond wheels was proposed utilizing rotary green silicon carbon rod, and then the high-efficiency grinding of the aspheric surface was performed. First, the principle of mutual-wear for truing arc-shaped diamond wheel was introduced, and the truing performance was studied. The experimental results showed that the top morphology of the trued arc-shaped wheel was precise and smooth, and the run error on the top of the trued arcshaped wheel was reduced from 41 to 10mm after truing. Furthermore, high-efficiency grinding experiments revealed that the surface quality of the aspheric surface increased with the increase in the average material removal rates.
引用
收藏
页码：186 / 192
页数：7
相关论文
共 50 条
  • [31] High speed grinding of silicon nitride with electroplated diamond wheels, II. Wheel topography and grinding mechanisms
    Natl. Inst. of Std. and Technology, Manufacturing Engineering Laboratory, Gaithersburg, MD 20899, United States
    不详
    Am Soc Mech Eng Manuf Eng Div MED, (443-452):
  • [32] High speed grinding of silicon nitride with electroplated diamond wheels, part 2: Wheel topography and grinding mechanisms
    Hwang, TW
    Evans, CJ
    Malkin, S
    JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2000, 122 (01): : 42 - 50
  • [33] Grinding temperature within contact arc between wheel and workpiece in high-efficiency grinding of ultrahard cutting tool materials
    Kuriyagawa, T
    Syoji, K
    Ohshita, H
    JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2003, 136 (1-3) : 39 - 47
  • [34] High-efficiency electronic accommodation of energy of heterogeneous recombination of hydrogen atoms on the surface of the monocrystal ZnS
    Grankin, VP
    Shalamov, VY
    Uzunoglu, NK
    CHEMICAL PHYSICS LETTERS, 2000, 328 (1-2) : 10 - 16
  • [35] High Efficiency Precision Grinding of Micro-structured SiC Surface Using Laser Micro-structured Coarse-Grain Diamond Grinding Wheel
    Wu, Mingtao
    Guo, Bing
    Zhao, Qingliang
    Zhang, Jun
    Fang, Xiaoyan
    He, Ping
    INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING-GREEN TECHNOLOGY, 2019, 6 (03) : 577 - 586
  • [36] High Efficiency Precision Grinding of Micro-structured SiC Surface Using Laser Micro-structured Coarse-Grain Diamond Grinding Wheel
    Mingtao Wu
    Bing Guo
    Qingliang Zhao
    Jun Zhang
    Xiaoyan Fang
    Ping He
    International Journal of Precision Engineering and Manufacturing-Green Technology, 2019, 6 : 577 - 586
  • [37] Surface quality of high-speed steels in high-efficiency grinding with CBN wheels
    Savchenko, Yu.Ya.
    Delevi, V.G.
    Smaglenko, F.P.
    Leshchuk, I.V.
    Bagno, N.G.
    Peschnskaya, L.I.
    Sverkhtverdye Materialy, 1992, (01): : 40 - 45
  • [38] High speed grinding of silicon nitride with electroplated diamond wheels, part 1: Wear and wheel life
    Hwang, TW
    Evans, CJ
    Whitenton, EP
    Malkin, S
    JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2000, 122 (01): : 32 - 41
  • [39] Grinding temperature during high-efficiency grinding Inconel 718 using porous CBN wheel with multilayer defined grain distribution
    Chen, Z. Z.
    Xu, J. H.
    Ding, W. F.
    Ma, C. Y.
    Fu, Y. C.
    INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2015, 77 (1-4): : 165 - 172
  • [40] Grinding temperature during high-efficiency grinding Inconel 718 using porous CBN wheel with multilayer defined grain distribution
    Z. Z. Chen
    J. H. Xu
    W. F. Ding
    C. Y. Ma
    Y. C. Fu
    The International Journal of Advanced Manufacturing Technology, 2015, 77 : 165 - 172
12345