On-machine truing of diamond wheel and high-efficiency grinding of monocrystal silicon for aspheric surface

To realize the high-efficiency grinding of the aspheric surfaces on monocrystal silicon, a novel on-machine truing method for the resin-bonded arc-shaped diamond wheels was proposed utilizing rotary green silicon carbon rod, and then the high-efficiency grinding of the aspheric surface was performed. First, the principle of mutual-wear for truing arc-shaped diamond wheel was introduced, and the truing performance was studied. The experimental results showed that the top morphology of the trued arc-shaped wheel was precise and smooth, and the run error on the top of the trued arcshaped wheel was reduced from 41 to 10mm after truing. Furthermore, high-efficiency grinding experiments revealed that the surface quality of the aspheric surface increased with the increase in the average material removal rates.