The Model of Nano-Scale Copper Particle Removal from Silicon Surface in High Pressure CO2+H2O and CO2+H2O+IPA Cleaning Solutions

被引：1

作者：

Tan, Xin ^{[1
]}

Chai, Jiajue ^{[1
]}

Zhang, Xiaogang ^{[1
]}

Chen, Jiawei ^{[2
]}

机构：

[1] Renmin Univ China, Dept Chem, Beijing 100872, Peoples R China

[2] China Univ Geosci, State Key Lab Geol Proc & Mineral Resources, Beijing 100083, Peoples R China

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2011年 / 11卷 / 12期

关键词：

Equilibrium Separation Distance; Net Adhesion Force; High Pressure; Supercritical CO2; SUPERCRITICAL CARBON-DIOXIDE; LOW-K DIELECTRICS; WATER; SYSTEM;

D O I：

10.1166/jnn.2011.3970

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

This study focuses on the description of the static forces in CO2-H2O and CO2-H2O-IPA cleaning solutions with a separate fluid phase entrapped between nano-scale copper particles and a silicon surface. Calculations demonstrate that increasing the pressure of the cleaning system decreases net adhesion force (NAF) between the particle and silicon. The NAF of a particle for in CO2-H2O-PA system is less than that in CO2-H2O system, suggesting that the particles enter into bulk layer more easily as the CO2-H2O cleaning system is added IPA.

引用

页码：10782 / 10786

页数：5

共 50 条

[41] Phase diagram studies of methanol-H2O-CO2 and acetonitrile-H2O-CO2 mixtures
Lee, ST
Reighard, TS
Olesik, SV
FLUID PHASE EQUILIBRIA, 1996, 122 (1-2) : 223 - 241
[42] Progress in the study on the phase equilibria of the CO2-H2O and CO2-H2O-NaCl systems
Ji, Yuanhui
Ji, Xiaoyan
Feng, Xin
Liu, Chang
Lue, Linghong
Lu, Xiaohua
CHINESE JOURNAL OF CHEMICAL ENGINEERING, 2007, 15 (03) : 439 - 448
[43] ENTHALPIES IN SYSTEMS NA2CO3-H2O AND K2CO3-H2O
GINZBURG, DM
JOURNAL OF APPLIED CHEMISTRY OF THE USSR, 1974, 47 (10): : 2267 - 2270
[44] MEASUREMENT OF TOTAL SCATTERING CROSS-SECTIONS FOR H2O-H2O, CO2-O2 AND CO2-N2
SNOW, JT
BEREK, HE
HAGNER, GF
DOWEL, JT
FRESE, LH
TRANSACTIONS-AMERICAN GEOPHYSICAL UNION, 1972, 53 (11): : 990 - &
[45] HYDROTHERMAL PHASE-EQUILIBRIA IN ER2O3-H2O-CO2 AND TM2O3-H2O-CO2 SYSTEMS
MOHAMED, I
TAREEN, JAK
KUTTY, TRN
PROCEEDINGS OF THE INDIAN ACADEMY OF SCIENCES-CHEMICAL SCIENCES, 1984, 93 (05): : 785 - 793
[46] RELATIVE PARTIAL MOLAR ENTHALPIES OF ELECTROLYTES AND H2O IN NA2CO3-H2O, K2CO3-H2O, NAOH-H2O AND KOH-H2O SYSTEMS
GINZBURG, DM
KOCHKALDA, VE
ZHURNAL FIZICHESKOI KHIMII, 1978, 52 (07): : 1768 - 1771
[47] Study on the effect of H2O on the formation of CO in the counterflow diffusion flame of H2/CO syngas in O2/H2O
Wang, Pengxiang
Guo, Tingting
Xu, Huanhuan
Zhao, Yijun
Meng, Shun
Feng, Dongdong
Sun, Shaozeng
FUEL, 2018, 234 : 516 - 525
[48] Diffusion coefficients and viscosities of CO2+H2O, CO2+CH3OH, NH3+H2O, and NH3+CH3OH liquid mixtures
Twente Univ, Enschede, Netherlands
J Chem Eng Data, 2 (297-302):
[49] DETERMINATION OF VIBRATIONAL-RELAXATION TIME OF 00 DEGREES 1 LEVEL IN PURE CO2 AND IN CO2+H2O MIXTURE
VARGIN, AN
GOGOKHIYA, VV
KONYUKHOV, VK
PASYNKOVA, LM
ZHURNAL TEKHNICHESKOI FIZIKI, 1975, 45 (03): : 604 - 608
[50] Evaluation and extrapolation of the solubility of CH4 in CO2+H2O using molecular simulation: CO2 EOR and sequestration
Lee, Hyeonseok
Ostadhassan, Mehdi
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2019, 258

← 1 2 3 4 5 →