Dimensional Metrology with Atomic Force Microscopy

被引：0
|
作者：
Dixson, Ronald [1 ]
Orji, Ndubuisi G. [1 ]
机构：
[1] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
来源：
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS | 2012年 / 11卷 / 01期
关键词：
D O I：
10.1117/1.JMM.11.1.011001
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页数：1
相关论文
共 50 条
  • [1] Accurate dimensional metrology with atomic force microscopy
    Dixson, R
    Köning, R
    Fu, J
    Vorburger, T
    Renegar, B
    [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XIV, 2000, 3998 : 362 - 368
  • [2] Nanometer-scale dimensional metrology with noncontact atomic force microscopy
    Marchman, H
    [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY X, 1996, 2725 : 527 - 539
  • [3] Atomic force microscopy metrology of catalytic nanoparticles
    Bukharaev A.A.
    Ziganshina S.A.
    Chuklanov A.P.
    [J]. Nanotechnologies in Russia, 2010, 5 (5-6): : 364 - 376
  • [4] Atomic force microscope for accurate dimensional metrology
    Mazzeo, A. D.
    Stein, A. J.
    Trumper, D. L.
    Hocken, R. J.
    [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2009, 33 (02): : 135 - 149
  • [5] Advances in scanning force microscopy for dimensional metrology
    Danzebrink, H. -U.
    Koenders, L.
    Wilkening, G.
    Yacoot, A.
    Kunzmann, H.
    [J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2006, 55 (02) : 841 - 878
  • [6] MEMS displacement generator for atomic force microscopy metrology
    Babij, M.
    Majstrzyk, W.
    Sierakowski, A.
    Janus, P.
    Grabiec, P.
    Ramotowski, Z.
    Yacoot, A.
    Gotszalk, T.
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2021, 32 (06)
  • [7] Advances in the atomic force microscopy for critical dimension metrology
    Hussain, Danish
    Ahmad, Khurshid
    Song, Jianmin
    Xie, Hui
    [J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2017, 28 (01)
  • [8] METROLOGY OF ATOMIC-FORCE MICROSCOPY FOR SI NANOSTRUCTURES
    NAGASE, M
    NAMATSU, H
    KURIHARA, K
    IWADATE, K
    MURASE, K
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1995, 34 (6B): : 3382 - 3387
  • [9] Atomic force microscopy for cross section inspection and metrology
    Wilder, K
    Quate, CF
    Singh, B
    Alvis, R
    Arnold, WH
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4004 - 4008
  • [10] Development of a comprehensive metrology platform dedicated to dimensional measurements of CD atomic force microscopy tips
    Foucher, Johann
    Schmidt, Sebastian W.
    Labrosse, Aurelien
    Derville, Alexandre
    Bos, Sandra
    Schade, Sebastian
    Irmer, Bernd
    [J]. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXIX, 2015, 9424
12345