A Study of Temperature Dependence for Capacitive Pressure Sensor

被引：0
|
作者：
Lv, Hao Jie [1 ]
Hu, Guo Qing [2 ]
Wang, Xing Ye [3 ]
机构：
[1] Henan Univ, Sch Phys & Elect, Kaifeng 475001, Peoples R China
[2] Xiamen Univ, Dept Elect Mech Engn, Xiamen 361005, Peoples R China
[3] Zhengzhou Univ, Sch Informat Engn, Zhengzhou 450001, Peoples R China
来源：
VIBRATION, STRUCTURAL ENGINEERING AND MEASUREMENT I, PTS 1-3 | 2012年 / 105-107卷
关键词：
Capacitive pressure sensor; Temperature dependence; Thermo-mechanical analysis; THERMAL-CONDUCTIVITY; SILICON; FILMS;
D O I：
10.4028/www.scientific.net/AMM.105-107.2024
中图分类号：
TU [建筑科学];
学科分类号：
0813 ;
摘要：
In order to reveal the temperature dependence of a touch mode capacitive pressure sensor, temperature dependence of material parameters of the sense have been studied. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that the relation of capacitance and temperature is almost linear in touch state of the sensor. At the same time, temperature sensitivities under different pressure are slight difference, which are 0.0056pF/K and 0.0040pF/K, respectively. Therefore, the high-temperature performance of the sensor is greatly outstanding.
引用
收藏
页码：2024 / +
页数：2
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