Study on MEMS Capacitive Differential Pressure Sensor

被引：0
|
作者：
Hou Zhihao [1 ]
Huang Zhen [1 ]
Jia Shixing [1 ]
机构：
[1] Nanjing Elect Devices Inst, Nanjing, Jiangsu, Peoples R China
来源：
MICRO-NANO TECHNOLOGY XV | 2014年 / 609-610卷
关键词：
MEMS; Pressure sensor; Capacitive sensor;
D O I：
10.4028/www.scientific.net/KEM.609-610.968
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The design and fabrication of MEMS capacitive differential pressure sensor is reported. Silicon membrane is used as movable electrode. Gold metal film on glass is used as fixed electrode. Anodic bonding is used to bond together the silicon and glass to form the capacitive pressure sensor. The measurement capacitance of the sensors is 5.37 pF at an applied pressure of 0 kPa and 7.26 pF and the full operating range of 40 kPa. The ratio of changed to initial capacitance was 0.35. The error of the MEMS capacitive pressure sensor is less than 4% full-scale(FS) by using quadratic curve fitting which can meet most application requirements.
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页码：968 / 971
页数：4
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