A Study of Temperature Dependence for Capacitive Pressure Sensor

被引：0
|
作者：
Lv, Hao Jie [1 ]
Hu, Guo Qing [2 ]
Wang, Xing Ye [3 ]
机构：
[1] Henan Univ, Sch Phys & Elect, Kaifeng 475001, Peoples R China
[2] Xiamen Univ, Dept Elect Mech Engn, Xiamen 361005, Peoples R China
[3] Zhengzhou Univ, Sch Informat Engn, Zhengzhou 450001, Peoples R China
来源：
VIBRATION, STRUCTURAL ENGINEERING AND MEASUREMENT I, PTS 1-3 | 2012年 / 105-107卷
关键词：
Capacitive pressure sensor; Temperature dependence; Thermo-mechanical analysis; THERMAL-CONDUCTIVITY; SILICON; FILMS;
D O I：
10.4028/www.scientific.net/AMM.105-107.2024
中图分类号：
TU [建筑科学];
学科分类号：
0813 ;
摘要：
In order to reveal the temperature dependence of a touch mode capacitive pressure sensor, temperature dependence of material parameters of the sense have been studied. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that the relation of capacitance and temperature is almost linear in touch state of the sensor. At the same time, temperature sensitivities under different pressure are slight difference, which are 0.0056pF/K and 0.0040pF/K, respectively. Therefore, the high-temperature performance of the sensor is greatly outstanding.
引用
收藏
页码：2024 / +
页数：2
相关论文
共 50 条
  • [21] Robust capacitive pressure sensor array
    Chang, SP
    Lee, JB
    Allen, MG
    SENSORS AND ACTUATORS A-PHYSICAL, 2002, 101 (1-2) : 231 - 238
  • [22] SYMMETRICAL DIFFERENTIAL CAPACITIVE PRESSURE SENSOR
    PETERS, RD
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (08): : 2256 - 2261
  • [23] AN INTEGRATED MINIATURE CAPACITIVE PRESSURE SENSOR
    KUDOH, T
    SHOJI, S
    ESASHI, M
    SENSORS AND ACTUATORS A-PHYSICAL, 1991, 29 (03) : 185 - 193
  • [24] Miniature polymer capacitive pressure sensor
    Korivi, Naga S.
    Jiang, Li
    PROCEEDINGS IEEE SOUTHEASTCON 2007, VOLS 1 AND 2, 2007, : 344 - 344
  • [25] Integrated capacitive absolute pressure sensor
    Matsumoto, Yoshinori
    Esasi, Masayoshi
    Electronics and Communications in Japan, Part II: Electronics (English translation of Denshi Tsushin Gakkai Ronbunshi), 1993, 76 (01): : 93 - 106
  • [26] Optimum Design of a Capacitive Pressure Sensor
    Ibrahim, Khalilullah
    Khanna, Gargi
    PROCEEDINGS OF THE 10TH INDIACOM - 2016 3RD INTERNATIONAL CONFERENCE ON COMPUTING FOR SUSTAINABLE GLOBAL DEVELOPMENT, 2016, : 1685 - 1688
  • [27] Study of a novel capacitive pressure sensor using spiral comb electrodes
    Chen, Wenjie
    Yang, Qi
    Liu, Qi
    Zhang, Yiqun
    He, Liang
    Xia, Yuanlin
    Wang, Zhuqing
    Xia, Cao
    Huang, Yubo
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2024, 35 (12)
  • [28] Performance Study of Flexible Capacitive Pressure Sensor Based on Dielectric Structures
    Hou, Qichao
    Liang, Mengmeng
    Liu, Ruping
    Wang, Wei
    ADVANCED GRAPHIC COMMUNICATIONS AND MEDIA TECHNOLOGIES, 2017, 417 : 515 - 523
  • [29] Design study of a capacitive pressure sensor in non-silicon materials
    Meuwissen, M. H. H.
    Veninga, E. P.
    Tijdink, M. W. W. J.
    Meijerink, M. G. H.
    PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 2006, 220 (11) : 1633 - 1643
  • [30] A study of a Silicon Carbide Capacitive Pressure Sensor Applied in Harsh Environment
    Lv, Hao Jie
    Yu, Hui Yong
    Hou, Jiang Hua
    Geng, Tao
    INDUSTRIAL INSTRUMENTATION AND CONTROL SYSTEMS, PTS 1-4, 2013, 241-244 : 984 - +
12345