Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

被引：13

作者：

Sun, Yan ^{[1
]}

Feng, Ganhua ^{[1
]}

Georgiou, George ^{[1
]}

Niver, Edip ^{[1
]}

Noe, Karen ^{[2
]}

Chin, Ken ^{[1
]}

机构：

[1] New Jersey Inst Technol, Dept Phys, Newark, NJ 07102 USA

[2] PSE&G Corp, Newark, NJ 07102 USA

来源：

MICROELECTRONICS JOURNAL | 2008年 / 39卷 / 05期

关键词：

center embossed diaphragm; Fabry-Perot; fiber optic; acoustic sensor; MEMS;

D O I：

10.1016/j.mejo.2007.12.020

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry-Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：711 / 716

页数：6

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