Design and fabrication of silicon condenser microphone using single deeply corrugated diaphragm technique

被引：6
|
作者：
Wang, WJ [1 ]
Lin, RM
Ren, Y
机构：
[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Ctr Mech Microsyst, Singapore, Singapore
[2] Nanyang Technol Univ, Sch Mech & Prod Engn, Tissue Engn Lab, Singapore, Singapore
来源：
MICROELECTRONICS INTERNATIONAL | 2003年 / 20卷 / 03期
关键词：
silicon; design; fabrication; electrical machines;
D O I：
10.1108/13565360310487936
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A single wafer silicon condenser microphone with a novel single deeply corrugated diaphragm is presented in this paper. The microphone diaphragm with corrugation depth of 100 mum is only 1 mm(2) in area, while the open-circuit sensitivity as high as 9.8 mV/Pa under a bias voltage of 6 V has been obtained. The recorded frequency bandwidth is about 20 kHz. The measurements show reasonable agreements with the theoretical predictions.
引用
收藏
页码：36 / 40
页数：5
相关论文
共 50 条
  • [21] imulation and Optimization of a Micro-machined Silicon Condenser Microphone Using a Perforated Diaphragm
    Zhang, Duan
    Fang, Qi
    He, Xiongxiong
    PROCEEDINGS OF THE 2014 9TH IEEE CONFERENCE ON INDUSTRIAL ELECTRONICS AND APPLICATIONS (ICIEA), 2014, : 1682 - 1687
  • [22] Fabrication of a piston-type condenser microphone with structured polysilicon diaphragm
    Margesin, B
    Faes, A
    Giacomozzi, F
    Bagolini, A
    Zen, M
    SENSORS AND MICROSYSTEMS, PROCEEDINGS, 2004, : 382 - 387
  • [23] Ten-micrometer-thick Silicon Diaphragm Used in Condenser Microphone
    Kimori, Naoki
    Kumai, Yuichiro
    Hishinuma, Shinsuke
    Ikehara, Tsuyoshi
    Maeda, Ryutaro
    Nishioka, Yasushiro
    PROGRESS IN FUNCTIONAL MATERIALS, 2013, 538 : 277 - 280
  • [24] Design and fabrication of a novel single-chip MEMS capacitive microphone using slotted diaphragm
    Ganji, Bahram Azizollah
    Majlis, Burhanuddin Yeop
    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2009, 8 (02):
  • [25] Design and simulation of silicon condenser microphone for industrial use
    Dong, Jian
    Ji, Shiming
    Zhang, Libin
    PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING AND MECHANICS 2007, VOLS 1 AND 2, 2007, : 1781 - 1785
  • [26] Mechanical Analysis of Condenser Microphone Based on Silicon Carbide Diaphragm for Sonic Detection
    Zawawi, Siti Aisyah
    Hamzah, Azrul Azlan
    Majlis, Burhanuddin Yeop
    Mohd-Yasin, Faisal
    2016 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS (ICSE) PROCEEDINGS, 2016, : 25 - 28
  • [27] Fabrication of a biomimetic corrugated polysilicon diaphragm with attached single crystal silicon proof masses
    Yoo, K
    Yeh, JLA
    Tien, NC
    Gibbons, C
    Su, Q
    Cui, W
    Miles, RN
    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 130 - 133
  • [28] Design and fabrication of a new MEMS capacitive microphone using a perforated aluminum diaphragm
    Ganji, Bahram Azizollah
    Majlis, Burhanuddin Yeop
    SENSORS AND ACTUATORS A-PHYSICAL, 2009, 149 (01) : 29 - 37
  • [29] A miniature silicon condenser microphone improved with a flexure hinge diaphragm and a large back volume
    Kim, H. J.
    Lee, S. Q.
    Lee, J. W.
    Lee, S. K.
    Park, K. H.
    MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES, 2008, 1052 : 197 - 204
  • [30] High sensitivity silicon-based condenser microphone design
    Lee, Chiung-I
    Chien, Hsin-Tang
    Liu, Ping-Ting
    Chen, Jien Ming
    2007 INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE, PROCEEDINGS OF TECHNICAL PAPERS, 2007, : 38 - 41
12345