Hole transport in strained Si1-xGex alloys on Si1-yGey substrates

被引:42
|
作者
Bufler, FM [1 ]
Meinerzhagen, B [1 ]
机构
[1] Univ Bremen, Inst Theoret elektrotech & Mikroelektron, D-28334 Bremen, Germany
关键词
D O I
10.1063/1.368605
中图分类号
O59 [应用物理学];
学科分类号
摘要
Hole transport at 300 K in (001)-strained Si1-xGex alloys grown on unstrained Si1-yGey is theoretically analyzed considering the full band structure and new, accurate mobility experiments. Ohmic in-plane and out-of-plane drift mobilities are computed over the whole range of x and y. Velocity- field characteristics and transient overshoot effects are studied for fields along the [100] and [110] directions in technologically relevant configurations with Monte Carlo simulation. Overshoot peaks around 2 X 10(7) cm/s are found in strained Si and Ge-rich SiGe for 100 kV/cm and the [100] direction. (C) 1998 American Institute of Physics. [S0021-8979(98)06922-9].
引用
收藏
页码:5597 / 5602
页数:6
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