High power KrF excimer laser with a solid state switch for microlithography

被引：8
|
作者：
Mizoguchi, H [1 ]
Ito, N [1 ]
Nakarai, H [1 ]
Kobayashi, Y [1 ]
Itakura, Y [1 ]
Komori, H [1 ]
Wakabayashi, O [1 ]
Aruga, T [1 ]
Sakugawa, T [1 ]
Koganezawa, T [1 ]
机构：
[1] KOMATSU LTD,DIV RES,RES DEPT 2,HIRATSUKA,KANAGAWA 254,JAPAN
来源：
OPTICAL MICROLITHOGRAPHY IX | 1996年 / 2726卷
关键词：
KrF; excimer laser; solid state switch; deep-UV; CoO;
D O I：
10.1117/12.240945
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：831 / 840
页数：10
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