Development of Pneumatic Servo Bearing Actuator for Ultra-Precise Positioning

被引：0
|
作者：
Sasaki, Katsumi [1 ]
Hirayama, Tomoko [2 ]
机构：
[1] Pneumat Servo Controls Ltd, Moriyama Ku, Nagoya, Aichi 4630003, Japan
[2] Doshisha Univ, Fac Sci & Engn, Kyotanabe, Kyoto 6100394, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2011年 / 56卷 / 03期
关键词：
aerostatic bearing; actuator; ultra-precise positioning; pneumatic servo; multi-layered pads; design; development;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：149 / 154
页数：6
相关论文
共 50 条
  • [31] ULTRA-PRECISE SCREENS FILTER NUCLEAR WASTE
    SANDFORD, J
    DESIGN NEWS, 1974, 29 (06) : 123 - 123
  • [32] RCNP techniques for producing ultra-precise beams
    Ninomiya, S
    Saito, T
    Tamura, H
    Sato, K
    CYCLOTRONS AND THEIR APPLICATIONS 2001, 2001, 600 : 94 - 98
  • [33] Development of a Device for Measurement of the Deviations of the Form and Roughness of the Surfaces of Ultra-Precise Parts
    D. A. Masterenko
    P. N. Emel’yanov
    M. G. Koval’skii
    A. Yu. Baikovskii
    S. Yu. Alabin
    Measurement Techniques, 2014, 57 : 260 - 265
  • [34] Development of a Device for Measurement of the Deviations of the Form and Roughness of the Surfaces of Ultra-Precise Parts
    Masterenko, D. A.
    Emel'yanov, P. N.
    Koval'skii, M. G.
    Baikovskii, A. Yu.
    Alabin, S. Yu.
    MEASUREMENT TECHNIQUES, 2014, 57 (03) : 260 - 265
  • [35] Development of an ultra-precise time measuring instrument; Pride and technology of a small factory
    J. Inst. Electr. Eng. Jpn., 1 (32-35):
  • [36] Study on ultra-precise machining of CLBO crystal
    Lv, X
    Yuan, JL
    Dai, Y
    Zheng, JJ
    Zhou, ZZ
    Zhao, P
    ADVANCES IN GRINDING AND ABRASIVE TECHNOLOGY XIII, 2006, 304-305 : 398 - 402
  • [37] Research on the ultra-precise measurement of cylinder diameters
    Chen, ZF
    Lu, HB
    Zhang, SZ
    Wu, MG
    ISTM/2001: 4TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1 AND 2, CONFERENCE PROCEEDINGS, 2001, : 999 - 1002
  • [38] The Servo System Drive and Control of Pneumatic Actuator
    Yin, Ximei
    Zhang, Zhang
    Wang, Yuxiang
    2018 4TH INTERNATIONAL CONFERENCE ON ENVIRONMENTAL SCIENCE AND MATERIAL APPLICATION, 2019, 252
  • [39] Modeling and control of a miniature servo pneumatic actuator
    Rao, Zhihong
    Bone, Gary M.
    2006 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA), VOLS 1-10, 2006, : 1806 - 1811
  • [40] Development of small-sized digital servo valve for wearable pneumatic actuator
    Dohta, Shujiro
    Akagi, Tetsuya
    Masago, Yusuke
    Matsushita, Hisashi
    Zhang, Ying
    INTERNATIONAL SYMPOSIUM ON ROBOTICS AND INTELLIGENT SENSORS 2012 (IRIS 2012), 2012, 41 : 97 - 104
12345