Development of Pneumatic Servo Bearing Actuator for Ultra-Precise Positioning

被引：0
|
作者：
Sasaki, Katsumi [1 ]
Hirayama, Tomoko [2 ]
机构：
[1] Pneumat Servo Controls Ltd, Moriyama Ku, Nagoya, Aichi 4630003, Japan
[2] Doshisha Univ, Fac Sci & Engn, Kyotanabe, Kyoto 6100394, Japan
来源：
JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS | 2011年 / 56卷 / 03期
关键词：
aerostatic bearing; actuator; ultra-precise positioning; pneumatic servo; multi-layered pads; design; development;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：149 / 154
页数：6
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