Mechanics of end effects in thin film and substrate stress distributions

被引:3
|
作者
Murray, CE [1 ]
Noyan, IC [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
来源
关键词
stress; x-ray diffraction; mechanics;
D O I
10.4028/www.scientific.net/MSF.490-491.13
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
下载
收藏
页码:13 / 18
页数:6
相关论文
共 50 条
  • [31] THIN-FILM STRESS FROM NONSPHERICAL SUBSTRATE BENDING MEASUREMENTS
    FAHNLINE, DE
    MASTERS, CB
    SALAMON, NJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (04): : 2483 - 2487
  • [32] Thermal stress analysis for polyimide thin film and a substrate layer system
    Lee, SH
    Bae, YC
    MACROMOLECULAR CHEMISTRY AND PHYSICS, 2000, 201 (12) : 1286 - 1291
  • [33] DEFLECTION OF A SUBSTRATE-INDUCED BY AN ANISOTROPIC THIN-FILM STRESS
    VANDERIET, E
    JOURNAL OF APPLIED PHYSICS, 1994, 76 (01) : 584 - 586
  • [34] Effects of substrate preparation on the stress of Nb thin films
    Bass, RB
    Lichtenberger, LT
    Lichtenberger, AW
    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2003, 13 (02) : 3298 - 3300
  • [35] Extension, of Stoney's formula to arbitrary temperature distributions in thin film/substrate systems
    Huang, Y.
    Rosakis, A. J.
    JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME, 2007, 74 (06): : 1225 - 1233
  • [36] Substrate effects on the properties of the pyroelectric thin film IR detectors
    Ko, JS
    Liu, WG
    Zhu, WG
    SENSORS AND ACTUATORS A-PHYSICAL, 2001, 93 (02) : 117 - 122
  • [37] Surface effects on delamination of a thin film bonded to an elastic substrate
    Y. Yang
    K. Y. Lee
    X.-F. Li
    International Journal of Fracture, 2018, 210 : 81 - 94
  • [38] Effects of substrate temperature on resistive switching of TiOX thin film
    Wang, Lanlan
    Zhang, Kailiang
    Wang, Fang
    Song, Kai
    CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2011 (CSTIC 2011), 2011, 34 (01): : 571 - 576
  • [39] Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
    Saha, R
    Nix, WD
    ACTA MATERIALIA, 2002, 50 (01) : 23 - 38
  • [40] Surface effects on delamination of a thin film bonded to an elastic substrate
    Yang, Y.
    Lee, K. Y.
    Li, X. -F.
    INTERNATIONAL JOURNAL OF FRACTURE, 2018, 210 (1-2) : 81 - 94