Mechanics of end effects in thin film and substrate stress distributions

被引:3
|
作者
Murray, CE [1 ]
Noyan, IC [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
来源
关键词
stress; x-ray diffraction; mechanics;
D O I
10.4028/www.scientific.net/MSF.490-491.13
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
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页码:13 / 18
页数:6
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