Magnetic comb drive actuator

被引：0
|
作者：
Schonhardt, S. [1 ]
Korvink, J. G. [1 ]
Mohr, J. [2 ]
Hollenbach, U. [2 ]
Wallrabe, U. [1 ]
机构：
[1] Univ Freiburg, IMTEK, Dept Microsyst Engn, D-7800 Freiburg, Germany
[2] IMT, Forschungszentrum Karlsruhe GmbH, Karlsruhe, Germany
来源：
MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2008年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present the first electromagnetic comb drive actuator which allows for large, linear actuator motion at large air gap widths of 25 mu m and a structural height of 400 mu m. Previously reported designs require very narrow air gaps of 3 mu m at structural heights of up to 1 mm [1] which makes them sensitive to operate, and challenging to fabricate. The new design reduces the reluctance by a parallel connection of several pole shoes as is well known for electrostatic actuators, which reduces the current consumption and linearizes the current - displacement characteristic. Magnetic and mechanical material properties are measured for an accurate simulation of the system behavior. Experimental results verify the theoretical predictions.
引用
收藏
页码：479 / +
页数：2
相关论文
共 50 条
  • [31] Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications
    Xue, Gaopeng
    Toda, Masaya
    Li, Xinghui
    Li, Bing
    Ono, Takahito
    MICROMACHINES, 2022, 13 (08)
  • [32] Digital compensation technique for the improvement of the comb drive actuator transient response.
    Mahmoud, MS
    Khalil, D
    El-Hagry, MT
    Badr, MA
    DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2002, 2002, 4755 : 218 - 229
  • [33] Existence and Stability of Periodic Solutions of a Shifted Comb-Drive Finger Actuator
    Rivera, Andres
    Thibodeaux, Jeremy J.
    Sanchez, Johan S.
    JOURNAL OF APPLIED NONLINEAR DYNAMICS, 2022, 11 (01) : 247 - 269
  • [34] Vertical comb drive actuator constructed by buckled bridges in SOI-MEMS
    Sasaki, M
    Briand, D
    Noell, W
    de Rooij, N
    2003 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, 2003, : 89 - 90
  • [35] Fringing Capacitance and Tolerance of DRIE Effect on the Performance of the Comb-drive Actuator
    Jin, Jidong
    Cain, Chunhua
    Yang, Dong
    Qin, Ming
    2016 3RD INTERNATIONAL CONFERENCE ON INFORMATION SCIENCE AND CONTROL ENGINEERING (ICISCE), 2016, : 978 - 982
  • [36] Study on fabrication of polymer electrostatic comb-drive actuator by DXRL technique
    Li, Shipeng
    Li, Yigui
    Pham, Phuc Hong
    Dao, Dzung Viet
    Sugiyama, Susumu
    2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE, 2006, : 57 - +
  • [37] MINIATURE WISHBONE INTERFEROMETER USING ROTARY COMB DRIVE ACTUATOR FOR ENVIRONMENT GAS MONITORING
    Lee, Young-min
    Toda, Masaya
    Esashi, Masayoshi
    Ono, Takahito
    2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 716 - 719
  • [38] SiO2 Electret Generated by Potassium Ions on a Comb-Drive Actuator
    Sugiyama, Tatsuhiko
    Aoyama, Mitsuru
    Shibata, Yasushi
    Suzuki, Masato
    Konno, Takashi
    Ataka, Manabu
    Fujita, Hiroyuki
    Hashiguchi, Gen
    APPLIED PHYSICS EXPRESS, 2011, 4 (11)
  • [39] A New Analysis on Reduction of Undesired Beam Bending in Electrostatic Comb Drive MEMS Actuator
    Mukherjee, Banibrata
    Swamy, Kenkere Balashanthamurthy Mruthyunjaya
    Sen, Siddhartha
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2020, 69 (02) : 488 - 500
  • [40] Development of vertical electrostatic comb-drive actuator using magnified cascade configuration
    Chiou, Jin-Chern
    Kuo, Chin-Fu
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2007, 46 (10 A): : 6546 - 6549
12345