Study on fabrication of polymer electrostatic comb-drive actuator by DXRL technique

被引：0

作者：

Li, Shipeng ^{[1
]}

Li, Yigui ^{[2
]}

Pham, Phuc Hong ^{[1
]}

Dao, Dzung Viet ^{[1
]}

Sugiyama, Susumu ^{[1
]}

机构：

[1] Ritsumeikan Univ, Fac Sci & Engn, Dept Microsyst Technol, 1-1-1 Noji-Higashi, Kusatsu, Shiga 525, Japan

[2] Ritsumeikan Univ, Res Org Sci & Engn, Kusatsu, Shiga 5258577, Japan

来源：

2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE | 2006年

关键词：

D O I：

暂无

中图分类号：

R318 [生物医学工程];

学科分类号：

0831 ;

摘要：

This paper reports a novel approach to fabricate poly-methyl-meth-acrylate (PMMA) electrostatic comb-drive actuator using the deep x-ray lithography (DXRL) technique. The designed actuator consists of 140 units of interdigitated parallel capacitors with the linger gap and width being 2 mu m and 4 mu m respectively, and the thickness of the structure is 200 mu m, which makes the aspect ratio 50:1. A brief description of the design and simulation with ANSYS are also presented in this paper.

引用

页码：57 / +

页数：2

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