Study on fabrication of polymer electrostatic comb-drive actuator by DXRL technique

被引：0
|
作者：
Li, Shipeng [1 ]
Li, Yigui [2 ]
Pham, Phuc Hong [1 ]
Dao, Dzung Viet [1 ]
Sugiyama, Susumu [1 ]
机构：
[1] Ritsumeikan Univ, Fac Sci & Engn, Dept Microsyst Technol, 1-1-1 Noji-Higashi, Kusatsu, Shiga 525, Japan
[2] Ritsumeikan Univ, Res Org Sci & Engn, Kusatsu, Shiga 5258577, Japan
来源：
2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE | 2006年
关键词：
D O I：
暂无
中图分类号：
R318 [生物医学工程];
学科分类号：
0831 ;
摘要：
This paper reports a novel approach to fabricate poly-methyl-meth-acrylate (PMMA) electrostatic comb-drive actuator using the deep x-ray lithography (DXRL) technique. The designed actuator consists of 140 units of interdigitated parallel capacitors with the linger gap and width being 2 mu m and 4 mu m respectively, and the thickness of the structure is 200 mu m, which makes the aspect ratio 50:1. A brief description of the design and simulation with ANSYS are also presented in this paper.
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页码：57 / +
页数：2
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